RESEARCH

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【Transfer-print for MEMS Fabrication】
Transfer-print is a process, in which thin-film of material is transferred from a micro-structured stamp to a substrate. This process isgenrally utilized for two-dimensional pattern to be appplied in a flexible electronics. We have applied this technique to fabricate 3-dimentional mechanical elements for MEMS. We fabricated a array of supported micro-beam, of which the thickness is less than 100nm, on a flexible PET film by transfer-print. It is demonstrated that Transfer-print is a important candidate for novel MEM process forflexible film.


【Development of Micro-actuation Device for Cell Stimulation】
A mechanical stimulation allows cultured cells to generate their original function, for example an enhancement of  proliferation and neuriteelongation. We have developed a micro-actuation device to perform a mehcanical stimulation of isolated single cell by conductivepolymer. Poly-pyrrole (PPy) is patterned into a micro-pattern. (micro-dots) by localized polymerization process using a template. Themicro-dots of PPy can be changed expanded or contracted by an adsorption or emission of ions in electoryte solution with appliedvoltage. It is demonstrated that the change of PPy volume is reached to 10% (sub-micrometer).


【Self-patterning of Cells on Micro-structured Scaffold】
In advanced medhical technlogies, interactions of cell is required for an investigation of cell function and neurite elongationa drug discoveryresearch. A patterning of cultured cell is an important technical issue. A micro-structured scaffold is a candidate for self-patterning of cells.Self-assembly of particles easily allows us to have a geometrically textured surface. The self-assembled particles have a specific surfaceasperities with hexagonally arrangement. We demonstrated that cells are autonomously located on line patterns of self-assembledparticles. Namely, the self-assembled particles works as a micro-structured scaffold for cell patterning.