RESEARCH


Transfer-print for MEMS fabrication
Transfer-print is a process, in which thin-film of material is transferred from a micro-structured stamp to a substrate. This process isgenrally utilizedfor two-dimensional pattern to be appplied in a flexible electronics. We have applied this technique to fabricate 3-dimentional mechanicalelements for MEMS. We fabricated a array of supported micro-beam, of which the thickness is less than 100nm, on a flexible PET film by transfer-print. It is demonstrated that Transfer-print is a important candidate for novel MEM process forflexible film.

A. Kaneko et al., Int. J. of Automation Technology, 13, 6, (2019), 810-816.


Micro-actuator using poly-pyrrole for bio/micro-device
A mechanical stimulation allows cultured cells to generate their original function, for example an enhancement of  proliferation andneuriteelongation. We have developed a micro-actuation device to perform a mehcanical stimulation of isolated single cell byconductivepolymer. Poly-pyrrole (PPy) is patterned into a micro-pattern. (micro-dots) by localized polymerization process using a template.Themicro-dots of PPy can be changed expanded or contracted by an adsorption or emission of ions in electoryte solution with appliedvoltage. Itis demonstrated that the change of PPy volume is reached to 10%  (sub-micrometer).

K. Kawaguchi et al., Int. J. Automation Technol., 14, 2, (2020), 167-174.


Surface force evaluation and its application to nano- and precision manufacturing
We prepared a specialized OTS-coated probe as well as a standard glass probe to verify validity of the indirect surface force measurement. For acase of surface force between Si and APTES surfaces, the indirectly measured value reasonably corresponds to the directly measured value. It isconfirmed that the proposed method is effective for surface force evaluation for arbitrary two surfaces without probe coating.

長橋ほか,精密工学会誌,86, 1, (2020), 93-98.


Self-patterning of Cells on micro-structured particles
In advanced medhical technlogies, interactions of cell is required for an investigation of cell function and neurite elongationa drugdiscoveryresearch. A patterning of cultured cell is an important technical issue. A micro-structured scaffold is a candidate for self-patterning ofcells.Self-assembly of particles easily allows us to have a geometrically textured surface. The self-assembled particles have a specificsurfaceasperities with hexagonally arrangement. We demonstrated that cells are autonomously located on line patterns of self-assembledparticles. Namely, the self-assembled particles works as a micro-structured scaffold for cell patterning..

I. Takeda et al., Materials Scienceand Engineering C, 50, (2015), 173-178.